DORTMUND, Germany–(BUSINESS WIRE)–SMI (Silicon Microstructures, Inc.), a subsidiary of Elmos, has launched the SM5221 and SM6221 fully digital, low pressure MEMS sensor series as part of the SM5000 and SM6000 families. Covering pressure ranges from 0.3 to 2.0 psi (21 to 140 cmH2O), the sensors have a better than 1% initial accuracy and less than 1% total output shift over life (1% shift over 1000hr HTOL). The AccuStable(TM) brand thus guarantees they are among the most stable low-pressure sen